1231 |
87-2
|
期刊論文
|
微小世界與微機械
|
1232 |
90-1
|
期刊論文
|
The SOI-like method of reducing the die size of bulk-micromachined sensors
|
1233 |
93-1
|
期刊論文
|
A Micromachined Microwave Switch Fabricated by the Complementary Metal Oxide Semiconductor Post-Process of Etching Silicon Dioxide
|
1234 |
88-1
|
期刊論文
|
Fabrication of 3-D micro-coils with ferro-magnetic cores using a standard CMOS process
|