A Novel Method Guiding IC Manufacturing R&D Direction: Perspective from Knowledge Integration Innovation
學年 107
學期 1
出版（發表）日期 2018-08-01
作品名稱 A Novel Method Guiding IC Manufacturing R&D Direction: Perspective from Knowledge Integration Innovation
作品名稱（其他語言）
著者 Han-Jen Niu; Chao-Jung Chang
單位
出版者
著錄名稱、卷期、頁數 International Journal of Innovative Computing, Information and Control, 14(4), p.1371-1388
摘要 Integrated circuit (IC) manufacturing involves complex processes and may require months to complete. Thousands of messages will be generated during each process, and most messages can easily be identified and analyzed. However, ambiguous information remains as a kind of tacit knowledge that is one of the most essential issues of R&D management. Integrated innovation is an application of scientific/technological creative solutions to complex processes. This research uses a case study of a semiconductor company in Hsinchu Science Park in northern Taiwan. Traditional methods only yield the results inferred from explicit knowledge, and omit the results based on tacit knowledge. The integrated method can be designated as a clear direction for the R&D which uses the multivariate statistical analysis as virtual sensors. By involving Hotelling T2, and the principal component analysis (PCA), to generate specific results corresponding to the core of the high density plasma chemical vapor deposition (HDP CVD) equipment or process, eliminate inaccurate information using the experience rating in a 12-inch fab. This provides an approach that can guide the R&D engineers and illuminate the entire process. In sum, both process stabilization and cost savings are the major advantages of virtual sensors.
關鍵字 Integrated innovation method;R&D management;Virtual sensors;Knowledge management;Multivariate statistical analysis;IC manufacturing
語言 en
ISSN 1349-4198
期刊性質 國外
收錄於 EI
產學合作
通訊作者
審稿制度 否
國別 JPN
公開徵稿
出版型式 ,電子版,紙本
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