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2014-10-15 |
| 097 / 1 |
Metal Removal from Silicon Sawing Waste using the Electrokinetic Method
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2011-10-24 |
| 096 / 1 |
Effect of Organic Acids on Copper Chemical Mechanical Polishing
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2014-07-18 |
| 093 / 2 |
Glycolic Acid in Hydrogen Peroxide-Based Slurry for Enhancing Copper Chemical Mechanical Polishing
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2017-01-13 |
| 095 / 2 |
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2011-10-24 |
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2012-03-19 |
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2017-05-09 |
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A study of copper chemical mechanical polishing in urea–hydrogen peroxide slurry by electrochemical impedance spectroscopy
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2013-05-31 |
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Effects of Nonionic Surfactants on Performance of Copper Chemical Mechanical Polishing
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2013-05-31 |