教師資料查詢 | 類別: 期刊論文 | 教師: 牛涵錚 Han-jen Niu (瀏覽個人網頁)

標題:A Novel Method Guiding IC Manufacturing R&D Direction: Perspective from Knowledge Integration Innovation
學年107
學期1
出版(發表)日期2018/08/01
作品名稱A Novel Method Guiding IC Manufacturing R&D Direction: Perspective from Knowledge Integration Innovation
作品名稱(其他語言)
著者Han-Jen Niu; Chao-Jung Chang
單位
出版者
著錄名稱、卷期、頁數International Journal of Innovative Computing, Information and Control, 14(4), p.1371-1388
摘要Integrated circuit (IC) manufacturing involves complex processes and may
require months to complete. Thousands of messages will be generated during each process,
and most messages can easily be identified and analyzed. However, ambiguous information remains as a kind of tacit knowledge that is one of the most essential issues of R&D
management. Integrated innovation is an application of scientific/technological creative
solutions to complex processes. This research uses a case study of a semiconductor company in Hsinchu Science Park in northern Taiwan. Traditional methods only yield the
results inferred from explicit knowledge, and omit the results based on tacit knowledge.
The integrated method can be designated as a clear direction for the R&D which uses
the multivariate statistical analysis as virtual sensors. By involving Hotelling T2, and
the principal component analysis (PCA), to generate specific results corresponding to the
core of the high density plasma chemical vapor deposition (HDP CVD) equipment or
process, eliminate inaccurate information using the experience rating in a 12-inch fab.
This provides an approach that can guide the R&D engineers and illuminate the entire
process. In sum, both process stabilization and cost savings are the major advantages of
virtual sensors.
關鍵字Integrated innovation method;R&D management;Virtual sensors;Knowledge management;Multivariate statistical analysis;IC manufacturing
語言英文
ISSN1349-4198
期刊性質國外
收錄於EI;
產學合作
通訊作者
審稿制度
國別日本
公開徵稿
出版型式,電子版,紙本
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