教師資料查詢 | 類別: 期刊論文 | 教師: 吳乾埼 WU, CHYAN-CHYI (瀏覽個人網頁)

標題:Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film
學年106
學期2
出版(發表)日期2018/06/27
作品名稱Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film
作品名稱(其他語言)
著者Yu-Wei Chen; Chyan-Chyi Wu; Cheng-Chih Hsu; Ching-Liang Dai
單位
出版者
著錄名稱、卷期、頁數Applied Sciences 8(7), 1047
摘要Manufacturing and testing of a TMG (thermoelectric microgenerator) with CNCs (carbon nanocapsules) film fabricated utilizing a CMOS (complementary metal oxide semiconductor) technology are investigated. The microgenerator includes a CNCs layer, thermopiles, and thermometers. CNCs, a heat absorbing material, are coated on the microgenerator, so that the TD (temperature difference) of HP (hot part) and CP (cold part) in the thermopiles increases, resulting in an enhancement of the microgenerator OP (output power). Thermometers fabricated in the microgenerator are employed to detect the HP and CP temperature in thermopiles. In order to enhance thermopiles’ TD, the HP in thermopiles was manufactured as suspension structures isolating heat dissipation, and the CP in thermopiles was made on a silicon substrate to increase the heat sink. Experiments showed that the microgenerator OV (output voltage) was 3.3 mV and its output power was 125 pW at TD 3 K. Voltage and power factors of TMG were 0.71 mV/K/mm2 and 9.04 pW/K2/mm2, respectively.
關鍵字thermoelectric;microgenerator;CMOS-MEMS;carbon nanocapsules
語言英文
ISSN
期刊性質國外
收錄於SCI;
產學合作
通訊作者
審稿制度
國別瑞士
公開徵稿
出版型式,電子版
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