Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
學年 106
學期 2
出版（發表）日期 2018-03-01
作品名稱 Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
作品名稱（其他語言）
著者 Chang-Yuan Chen; Cheng-Chih Hsu; Chyan-Chyi Wu; Ching-Liang Dai
單位
出版者
著錄名稱、卷期、頁數 International Journal of Materials Science and Engineering 6(1), p.18-22
摘要 This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.
關鍵字 Sodium chloride concentration;nanowire device;n-type dopant;reusable
語言 en
ISSN
期刊性質 國外
收錄於 SCI EI
產學合作
通訊作者
審稿制度 是
國別 USA
公開徵稿
出版型式 ,電子版
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/116036 )

SDGS 優質教育,尊嚴就業與經濟發展,產業創新與基礎設施