教師資料查詢 | 類別: 期刊論文 | 教師: 吳乾埼 WU, CHYAN-CHYI (瀏覽個人網頁)

標題:Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
學年106
學期2
出版(發表)日期2018/03/01
作品名稱Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device
作品名稱(其他語言)
著者Chang-Yuan Chen; Cheng-Chih Hsu; Chyan-Chyi Wu; Ching-Liang Dai
單位
出版者
著錄名稱、卷期、頁數International Journal of Materials Science and Engineering 6(1), p.18-22
摘要This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.
關鍵字Sodium chloride concentration;nanowire device;n-type dopant;reusable
語言英文
ISSN
期刊性質國外
收錄於SCI;EI;
產學合作
通訊作者
審稿制度
國別美國
公開徵稿
出版型式,電子版
相關連結
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