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標題:Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
學年104
學期1
出版(發表)日期2015/10/23
作品名稱Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
作品名稱(其他語言)
著者Chien-Fu Fong; Ching-Liang Dai; Chyan-Chyi Wu
單位
出版者
著錄名稱、卷期、頁數Sensors 15(10), pp.27047-27059
摘要A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
關鍵字methanol sensor;tin dioxide;cadmium sulfide;heater
語言英文
ISSN1424-8220
期刊性質國外
收錄於SCI;
產學合作
通訊作者Ching-Liang Dai
審稿制度
國別瑞士
公開徵稿
出版型式,電子版
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