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標題:Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip
學年103
學期1
出版(發表)日期2014/10/28
作品名稱Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip
作品名稱(其他語言)
著者Ming-Zhi Yang; Ching-Liang Dai; Chyan-Chyi Wu
單位
出版者
著錄名稱、卷期、頁數Sensors 14(11), pp.20360-20371
摘要The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90 %RH.
關鍵字humidity sensor;ring oscillator circuit;zinc oxide nanowire
語言英文
ISSN1424-8220
期刊性質國外
收錄於SCI;
產學合作
通訊作者Ching-Liang Dai
審稿制度
國別瑞士
公開徵稿
出版型式,電子版
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