教師資料查詢 | 類別: 期刊論文 | 教師: 吳乾埼 WU, CHYAN-CHYI (瀏覽個人網頁)

標題:Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
學年97
學期2
出版(發表)日期2009/02/01
作品名稱Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
作品名稱(其他語言)
著者Liu, Mao-chen; Dai, Ching-liang; Chan, Chih-hua; Wu, Chyan-chyi
單位淡江大學機械與機電工程學系
出版者Basel: Molecular Diversity Preservation International
著錄名稱、卷期、頁數Sensors 9(2), pp.869-880
摘要This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature
關鍵字
語言英文
ISSN1424-8220;1424-8239
期刊性質國外
收錄於SCI;
產學合作
通訊作者Dai, Ching-liang
審稿制度
國別瑞士
公開徵稿
出版型式,電子版
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