| A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip | |
|---|---|
| 學年 | 100 |
| 學期 | 1 |
| 出版（發表）日期 | 2011-12-01 |
| 作品名稱 | A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip |
| 作品名稱（其他語言） | |
| 著者 | Yang, Ming-Zhi; Dai, Ching-Liang; Wu, Chyan-Chyi |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Basel: M D P I AG |
| 著錄名稱、卷期、頁數 | Sensors 11(12), pp.11112–11121 |
| 摘要 | A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature. |
| 關鍵字 | ammonia microsensor; zinc oxide film; nanorod; readout circuit |
| 語言 | en_US |
| ISSN | 1424-8220 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Dai, Ching-Liang |
| 審稿制度 | |
| 國別 | CHE |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/96090 ) |
| SDGS | 優質教育,尊嚴就業與經濟發展,產業創新與基礎設施 |
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