教師資料查詢 | 類別: 期刊論文 | 教師: 吳乾埼 WU, CHYAN-CHYI (瀏覽個人網頁)

標題:A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
學年100
學期1
出版(發表)日期2011/12/01
作品名稱A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
作品名稱(其他語言)
著者Yang, Ming-Zhi; Dai, Ching-Liang; Wu, Chyan-Chyi
單位淡江大學機械與機電工程學系
出版者Basel: M D P I AG
著錄名稱、卷期、頁數Sensors 11(12), pp.11112–11121
摘要A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature.
關鍵字ammonia microsensor; zinc oxide film; nanorod; readout circuit
語言英文(美國)
ISSN1424-8220
期刊性質國外
收錄於SCI
產學合作
通訊作者Dai, Ching-Liang
審稿制度
國別瑞士
公開徵稿
出版型式紙本
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