教師資料查詢 | 類別: 期刊論文 | 教師: 吳乾埼 WU, CHYAN-CHYI (瀏覽個人網頁)

標題:Manufacture of micromirror arrays using a CMOS-MEMS Technique
學年97
學期2
出版(發表)日期2009/04/01
作品名稱Manufacture of micromirror arrays using a CMOS-MEMS Technique
作品名稱(其他語言)
著者Kao, Pin-Hsu; Dai, Ching-Liang; Hsu, Cheng-Chih; Wu, Chyan-Chyi
單位淡江大學機械與機電工程學系
出版者Basel: M D P I AG
著錄名稱、卷期、頁數Sensors 9(8), pp.6219-6231
摘要In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55° when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz.
關鍵字micromirror array;microactuator;CMOS-MEMS
語言英文
ISSN1424-8220;1424-8239
期刊性質國外
收錄於SCI
產學合作
通訊作者Dai, Ching-Liang
審稿制度
國別瑞士
公開徵稿
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