Manufacture of micromirror arrays using a CMOS-MEMS Technique
學年 97
學期 2
出版（發表）日期 2009-04-01
作品名稱 Manufacture of micromirror arrays using a CMOS-MEMS Technique
作品名稱（其他語言）
著者 Kao, Pin-Hsu; Dai, Ching-Liang; Hsu, Cheng-Chih; Wu, Chyan-Chyi
單位 淡江大學機械與機電工程學系
出版者 Basel: M D P I AG
著錄名稱、卷期、頁數 Sensors 9(8), pp.6219-6231
摘要 In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55° when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz.
關鍵字 micromirror array;microactuator;CMOS-MEMS
語言 en
ISSN 1424-8220 1424-8239
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Dai, Ching-Liang
審稿制度
國別 CHE
公開徵稿
出版型式
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65336 )

機構典藏連結
SDGS 優質教育,尊嚴就業與經濟發展,產業創新與基礎設施