Capacitive sensors and actuators by CMOS MEMS foundry
學年 114
學期 2
出版（發表）日期 2026-06-17
作品名稱 Capacitive sensors and actuators by CMOS MEMS foundry
作品名稱（其他語言）
著者 Lung-Jieh Yang; Chandrashekhar Tasupalli; Wei-Cheng Wang; Yi-Jen Wang; M. Valliammai; Chi-Yuan Lee
單位
出版者
著錄名稱、卷期、頁數 Micromachines 17(6), p.732
摘要 This article introduces the current status of the 0.18-micron CMOS MEMS foundry service platform provided by the Taiwan Semiconductor Research Institute (TSRI), extensively covering the CMOS MEMS components that it has supported in development and fabrication. It also attempts to expand the foundry service scope to the broader categories of capacitive sensors and electrostatic actuators. On the one hand, for fabless MEMS component designers, TSRI currently directly allows the design of two types of components: flow sensors with uniformly perforated membranes and actuators with comb-shaped interdigital electrodes. This service also includes tape-out and wire bonding packaging procedures, following procedures similar to those used by general IC designers. On the other hand, this article specifically presents a clear and feasible approach for MEMS designers equipped with simple wet-etching facilities and a clear and feasible approach to develop further CMOS MEMS components such as capacitive pressure sensors, accelerometers, micro mirrors, and scratch drive actuators with minimal post-processing and chip packaging steps. This work provides a practical CMOS-MEMS design and post-processing guideline for extending the current TSRI foundry platform toward capacitive sensing and electrostatic actuation applications with minimal additional fabrication complexity.
關鍵字 complementary-metal-oxide-semiconductor (CMOS) MEMS; fabless foundry; capacitive sensors; electrostatic actuators; post-process; micro mirror
語言 en_US
ISSN
期刊性質 國外
收錄於 SCI Scopus
產學合作
通訊作者 Lung-Jieh Yang
審稿制度 是
國別 CHE
公開徵稿
出版型式 ,電子版
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/129651 )

SDGS 尊嚴就業與經濟發展,產業創新與基礎設施,夥伴關係