Fabrication of WSe2 thin film by RF sputtering: structural and optical characterizations
學年 113
學期 2
出版（發表）日期 2025-05-01
作品名稱 Fabrication of WSe2 thin film by RF sputtering: structural and optical characterizations
作品名稱（其他語言）
著者 Shilpa Thakur; Thanigai Arul K; Sheng-Lung Chou; Chung-Li Dong; Asokan Kandasami
單位
出版者
著錄名稱、卷期、頁數 Optical Materials 162, 116772
摘要 The present study focuses on fabricating WSe2 thin films using radio frequency (RF) sputtering and their optical properties. These films were analyzed for their structural and optical properties using synchrotron-based Grazing Incidence X-ray Diffraction (GIXRD) and photoluminescence (PL). The GIXRD pattern shows that the deposited at 100 °C has higher crystallinity with a crystallite size of 29 ± 0.5 nm than the thin films deposited at room temperature, 3 ± 0.5 nm. The characteristic Raman band of the WSe2 is observed at 249.50 cm−1 and 253.54 cm−1 and the merging of these modes indicates the reduction of thickness. The intensity of the PL is enhanced in the film deposited at 100 °C compared with the other films. The CIE graphs reveal the predominantly violet emission. This is due to the recombination of an electron from the W interstitial and a hole in the valence band. These rational results provide a path to develop the next-generation intense violet emission from WSe2 thin films that would be a favorable and potential candidate for designing nanophotonic devices.
關鍵字
語言 en
ISSN 1873-1252; 0925-3467
期刊性質 國外
收錄於 SCI
產學合作
通訊作者
審稿制度 是
國別 NLD
公開徵稿
出版型式 ,電子版,紙本
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/129553 )