Development of vacuum-chamber-type capacitive micro-pressure sensors
學年 114
學期 1
出版（發表）日期 2025-11-18
作品名稱 Development of vacuum-chamber-type capacitive micro-pressure sensors
作品名稱（其他語言）
著者 Lung-Jieh Yang, De-Yu Jiang, Wei-Chen Wang, Chandrashekhar Tasupalli, Horng-Yuan Shih, and Yi-Jen Wang
單位
出版者
著錄名稱、卷期、頁數 Micromachines, 16(11), 1290
摘要 This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 µm CMOS-MEMS process, incorporated with additional post-processing steps such as metal wet etching, supercritical CO2 drying, and parylene encapsulation. The sensing architecture employs AD7746 as a capacitance-to-voltage converter (CVC), enabling the conversion of capacitance signals into voltage outputs for enhanced measurement fidelity. Structurally, the capacitive pressure sensor features a vacuum-sealed diaphragm capsule design with dual movable circular membranes functioning as sensing electrodes. A contact-mode capacitive configuration with a trapezoidal or Gong-like vacuum-chamber diaphragm is adopted to improve linearity and sensitivity. The output sensitivity was determined to be feasible for measuring dynamic pressure at 1–2 Pa resolution.
關鍵字 : capacitive pressure sensor; complementary metal oxide semiconductor (CMOS); vacuum chamber
語言 en
ISSN 2072-666X
期刊性質 國外
收錄於 SCI Scopus
產學合作
通訊作者 Lung-Jieh Yang
審稿制度 1
國別 CHE
公開徵稿
出版型式 ,電子版
SDGS 夥伴關係,優質教育,產業創新與基礎設施