Preparation and Investigation of Optoelectronic Properties of Polarity-Controllable Titanium Oxide Thin Films Using High-Power Impulse Magnetron Sputtering
學年 113
學期 1
出版（發表）日期 2024-11-28
作品名稱 Preparation and Investigation of Optoelectronic Properties of Polarity-Controllable Titanium Oxide Thin Films Using High-Power Impulse Magnetron Sputtering
作品名稱（其他語言）
著者 Shih-Chieh Hsu; Chao-Kuang Wen; Sheng-Chi Chen; You-Sheng Lu; Li-Hsien Yeh; Hui Sun
單位
出版者
著錄名稱、卷期、頁數 Ceramics International 51(4), p.4861-4869
摘要 In this study, we employed High Power Impulse Magnetron Sputtering (HiPIMS) to fabricate TiOx thin films on the Si (100) as well as Corning eagle XG glass substrates and investigated their optical, electrical, and crystalline properties for application in optoelectronic devices. We examined the effects of varying the oxygen flow ratios (fO2) on the chemical composition, crystalline structure, optoelectronic properties, and microstructure of the TiOx films. The results showed that as fO2 increased, the dominant bonding states within the films shifted from Ti0, Ti2+, and Ti3+ (at fO2 = 0 %) to mainly Ti2+, Ti3+, and Ti4+ (at fO2 ≥ 0.5 %); the conductivity type of the films also changed from n-type to p-type due to the transformation of the dominant oxidation state to Ti3+. Additionally, the film's transmittance significantly increased. The best p-type TiOx film with optimal properties was obtained with fO2 = 0.5 %. Furthermore, we investigated the effects of deposition pressure on the film's properties. It was observed that as the deposition pressure increased, the resistivity of the film gradually increased, while the transmittance showed a significant enhancement. These changes were attributed to alterations in the crystal structure and the transformation of Ti positions into Ti3+ and Ti4+. Finally, to evaluate the suitability of these titanium oxide films for light-sensing applications, we measured the variations in I-t and I-V curves for samples with different fO2 and deposition pressure. We further analyzed the response time of the current rise and decay when the films were exposed to UV light and their sensitivity towards the UV light source. p-type TiOx films with excellent light-sensing properties can be used in monitoring systems for energy conservation and carbon reduction.
關鍵字
語言 en_US
ISSN 0272-8842; 1873-3956
期刊性質 國外
收錄於 SCI
產學合作
通訊作者
審稿制度 否
國別 NLD
公開徵稿
出版型式 ,電子版,紙本
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機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/127651 )