Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology
學年 113
學期 1
出版（發表）日期 2025-01-14
作品名稱 Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology
作品名稱（其他語言）
著者 Lung-Jieh Yang；Wei-Cheng Wang；Chandrashekhar Tasupalli；MahammedInthiyaz Shaik
單位
出版者
著錄名稱、卷期、頁數 Eng 6(1) , p.15
摘要 This article presents a framework of using MEMS sensors to investigate unsteady flow speeds of a flapping wing or the new concept of sensors on flapping wings (SOFWs). Based on the implemented self-heating flow sensor using U18 complementary metal–oxide–semiconductor (CMOS) MEMS foundry provided by the Taiwan Semiconductor Research Institute (TSRI), the compact sensing region of the flow sensor was incorporated for in situ diagnostics of biomimetic flapping issues. The sensitivity of the CMOS MEMS flow sensor, packaged with a parylene coating of 10 μm thick to prolong the lifetime, was observed as −3.24 mV/V/(m/s), which was below the flow speed of 6 m/s. A comprehensive investigation was conducted on integrating CMOS MEMS flow sensors on the leading edge of the mean aerodynamic chord (m.a.c.) of the flexible 70-cm-span flapping wings. The interpreted flow speed signals were checked and demonstrated similar behavior with the (net) thrust force exerted on the flapping wing, as measured in the wind tunnel experiments using the force gauge. The experimental results confirm that the in situ measurements using the concept of SOFWs can be useful for measuring the aerodynamic forces of flapping wings effectively, and it can also serve for future potential applications.
關鍵字 sensors on flapping wings (SOFWs); flow sensor; CMOS MEMS; flapping wing
語言 en_US
ISSN 2673-4117
期刊性質 國內
收錄於 ESCI Scopus
產學合作
通訊作者 Wei-Cheng Wang
審稿制度 是
國別 CHE
公開徵稿
出版型式 ,電子版
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機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/127742 )

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