||The Roll-to-Roll (R2R) process refers to a high-efficiency, low-cost, continuous production method. The roll material used for processing is a flexible plastic or metal film. In many R2R processes, polarizing films are high-precision products with a high output value. In the production of conventional polarizers, product inspection will only be carried out after the production of the polarizing film is completed. The principal raw material of a polarizer sheet is a hydrophilic polymer, the properties of which may be influenced by water vapor, which degrades its quality. Whether or not the product is impacted can be ascertained by means of a quality inspection, but it must be performed after the process is finished. However, it is already too late when a defective product is detected: the production cost is increased, the schedule is influenced and the delivery date is delayed. The focus of this research was on environmental monitoring of the production drying process oven, but the commercial all-in-one sensors currently on the market cannot tolerate the temperature of the factory’s high-temperature oven. In particular, a commercial flow sensor is rarely suited to high-temperature applications. Some are expensive and cannot be widely distributed. Therefore, this study aimed to develop an integrated sensor to measure the internal environment of the drying process oven for the real-time monitoring of a polarizer sheet in the Roll-to-Roll (R2R) process. This study used micro-electro-mechanical systems (MEMS) technology to make a flexible three-in-one (temperature, humidity and flow) micro-sensor. We monitored the temperature, humidity and flow uniformity in a laboratory oven to simulate the environment of the actual factory oven, with the aim to provide data to confirm whether or not a polarizer sheet has dried. Our system can be monitored instantly by Arduino, or even Raspberry Pi 3, to realize the flexible micro-sensor layout and field verification, in order to optimize the R2R process and to enhance the yield and performance of the polarizer sheet process.