| A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications | |
|---|---|
| 學年 | 110 |
| 學期 | 1 |
| 發表日期 | 2021-11-16 |
| 作品名稱 | A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications |
| 作品名稱（其他語言） | |
| 著者 | Horng-Yuan Shih; Chin-Te Hsin; Cheng-Wei Yang; Hsin-Liang Chen; Jhe-Yuan Kuo |
| 作品所屬單位 | |
| 出版者 | |
| 會議名稱 | INTERNATIONAL SYMPOSIUM ON INTELLIGENT SIGNAL PROCESSING AND COMMUNICATION SYSTEMS (ISPACS 2021) |
| 會議地點 | Hualien,Taiwan |
| 摘要 | A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated with the MEMS sensor. The capacitive MEMS sensor has a sensitivity of 6.53 fF/kPa with a sensing range of 4-40 kPa (30-300 mmHg). The overall system has a measured conversion gain of 4.72 mV/kPa. The power dissipation of the whole circuit is only 6.46 μW. |
| 關鍵字 | CMOS MEMS;pressure sensor;blood pulse |
| 語言 | en |
| 收錄於 | |
| 會議性質 | 國際 |
| 校內研討會地點 | 無 |
| 研討會時間 | 20211116~20211119 |
| 通訊作者 | |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | |
| 出處 | |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/122165 ) |
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