Heterodyne displacement measurement with volume hologram as reflection type optical ruler
學年 97
學期 1
發表日期 2008-09-08
作品名稱 Heterodyne displacement measurement with volume hologram as reflection type optical ruler
作品名稱(其他語言)
著者 C.C. Hsu; C.C. Wu; J.Y. Lee; C.J. Chen
作品所屬單位
出版者
會議名稱 International Conference of Precision Measurement
會議地點 Amsterdam
摘要 Volume hologram wildly used in optical data storage, fiber optics communication, and 3D imaging. There are many advantages of volume hologram such as high diffraction efficiency, low manufacture cost, easy designing of diffraction pattern, and easy reproduced. Hence, we propose a novel method for displacement measurement which combined with heterodyne interferometry and reflection type volume holographic grating. In this paper, we demonstrate one dimension displacement measurement result and compare with two commercialized method. Based on the measured results, there are no significant differences between them. And the smallest displacement variation can be observed is about 14 pm.
關鍵字 heterodyne interferometry;optical ruler;volume hologram
語言 zh_TW
收錄於
會議性質 國際
校內研討會地點
研討會時間 20080908~20080912
通訊作者
國別 NLD
公開徵稿
出版型式
出處 Proceedings of ICPM 2008
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/116285 )