Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film
學年 106
學期 2
出版(發表)日期 2018-06-27
作品名稱 Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film
作品名稱(其他語言)
著者 Yu-Wei Chen; Chyan-Chyi Wu; Cheng-Chih Hsu; Ching-Liang Dai
單位
出版者
著錄名稱、卷期、頁數 Applied Sciences 8(7), 1047
摘要 Manufacturing and testing of a TMG (thermoelectric microgenerator) with CNCs (carbon nanocapsules) film fabricated utilizing a CMOS (complementary metal oxide semiconductor) technology are investigated. The microgenerator includes a CNCs layer, thermopiles, and thermometers. CNCs, a heat absorbing material, are coated on the microgenerator, so that the TD (temperature difference) of HP (hot part) and CP (cold part) in the thermopiles increases, resulting in an enhancement of the microgenerator OP (output power). Thermometers fabricated in the microgenerator are employed to detect the HP and CP temperature in thermopiles. In order to enhance thermopiles’ TD, the HP in thermopiles was manufactured as suspension structures isolating heat dissipation, and the CP in thermopiles was made on a silicon substrate to increase the heat sink. Experiments showed that the microgenerator OV (output voltage) was 3.3 mV and its output power was 125 pW at TD 3 K. Voltage and power factors of TMG were 0.71 mV/K/mm2 and 9.04 pW/K2/mm2, respectively.
關鍵字 thermoelectric;microgenerator;CMOS-MEMS;carbon nanocapsules
語言 en
ISSN
期刊性質 國外
收錄於 SCI
產學合作
通訊作者
審稿制度
國別 CHE
公開徵稿
出版型式 ,電子版
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/116035 )