System and Method for Measuring Distribution of Deformation using Atomic Force
學年 104
學期 2
專利開始日期 2016-06-21
專利結束日期 1900-01-01
作品名稱 System and Method for Measuring Distribution of Deformation using Atomic Force
作品名稱（其他語言）
著者 Bong Kyun Jang, Jae-Hyun Kim, Hak-Joo Lee, Kyung-Suk Kim, Chien-Kai Wang
單位
著錄名稱、卷期、頁數
描述
摘要 The present invention relates to an apparatus to measure distribution of deformation using an atomic force to measure a deformation rate of atomic scale with high resolution at low costs. The apparatus comprises: a laser light source which generates a laser beam; a first cantilever and a second cantilever close to a measurement sample or a reference sample to generate deformation due to an atomic force; an optical system which successively reflects the laser beam on the first cantilever and the second cantilever, controlling an optical path of the laser beam to arrange the first cantilever and the second cantilever in a position of a store; an observation part which observes the laser beam reflected on the second cantilever; and a stage placed on the measurement sample or the reference sample, moving to three axial directions of X, Y, and Z.COPYRIGHT KIPO 2016
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語言 other
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/111749 )