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標題:Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate
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學期
出版(發表)日期1998/07/01
作品名稱Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate
作品名稱(其他語言)
著者張文清; Chang, Wen-ching; Chang, Shih-jung; Sue, Chao-yung; Hsu, Chia-lu
單位淡江大學電機工程學系
出版者Wiley-Blackwell
著錄名稱、卷期、頁數Microwave and optical technology letters 18(4), pp.250-252
摘要In this letter, the wet etching technique is utilized to determine the proton exchange (PE) depth of z-cut nickel-indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth. While this result was applied to the fabrication of a ridge-type waveguide, the tilt angle of the sidewall on the ridge waveguide was about 70°, which has been successfully increased. © 1998 John Wiley & Sons, Inc. Microwave Opt Technol Lett 18: 250–252, 1998.
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語言英文
ISSN0895-2477
期刊性質國內
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產學合作
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國別中華民國
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