| Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent | |
|---|---|
| 學年 | 94 |
| 學期 | 1 |
| 出版（發表）日期 | 2005-12-01 |
| 作品名稱 | Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent |
| 作品名稱（其他語言） | |
| 著者 | Lo, Shih-shou; Chiu, Hua-kung; Chen, Chii-chang; Hsu Shih-chieh; Liu, Cheng-yi |
| 單位 | 淡江大學化學工程與材料工程學系 |
| 出版者 | IEEE Photonics Society |
| 著錄名稱、卷期、頁數 | Photonics Technology Letters 17(12), pp.2592-2594 |
| 摘要 | This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 1041-1135 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/53697 ) |
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