Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
學年 93
學期 1
出版（發表）日期 2005-01-01
作品名稱 Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
作品名稱（其他語言）
著者 Chen, Yih-hang; Su, An-jhih; Shiu, Sheng-jyh; Yu, Cheng-ching; Shen, Shih-haur
單位 淡江大學化學工程與材料工程學系
出版者 American Chemical Society
著錄名稱、卷期、頁數 Industrial & Engineering Chemistry Research 44(13), pp4676-4686
摘要 This work compliments and extends the capability of the run-to-run (R2R) control by sequencing the incomings such that improved control performance can be achieved. Unlike chemical or mechanical systems, this is important for semiconductor manufacturing processes because some prior information about the incoming wafers is generally available. First, the limitation of a R2R control type of feedback system is explained. The frequency domain explanation is as follows: a negative feedback system is effective rejecting a low-frequency type of disturbance. From the feedback property, then the answer to the feed sequencing problem becomes clear: arrange the feed (which we are capable of doing) in such a way that it gives a low-frequency characteristic. Furthermore, a scalar load strength indicator is derived, and an engineering approach is taken to sort the incomings effectively. Two policies, from thin to thick (in terms of prethickness, policy L2R) and from thick to thin (policy R2L), are proposed, and they are shown to provide a better control performance over the conventional random feed policy (R). The feed sequencing problems are tested for systems with different dimensions, e.g., single input single output, single input multiple output, and multiple input multiple output systems, which include the model of an experimental chemical mechanical polishing process, and the results show that an improved control performance can be obtained simply by arranging the feeds.
關鍵字
語言 en_US
ISSN 1520-5045 0888-5885
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度 否
國別 USA
公開徵稿
出版型式 ,電子版,紙本
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