Preparation and properties of Nano-silica Modified Negative Acrylate Photoresist
學年 97
學期 1
出版（發表）日期 2008-10-01
作品名稱 Preparation and properties of Nano-silica Modified Negative Acrylate Photoresist
作品名稱（其他語言）
著者 Lee, Chih-kang; Don, Trong-ming; Lai, Wei-chi; Chen, Chin-chung; Lin, Dar-jong; Cheng, Liao-ping
單位 淡江大學化學工程與材料工程學系
出版者 Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數 Thin Solid Films 516(23), pp. 8399-8407
摘要 A series of silica modified photoresists had been successfully developed through incorporation of a particular nanoparticles suspension. Free radical polymerization was employed to synthesize the binder, an acrylate copolymer resin of benzyl methacrylate, methacrylic acid and 2-hydroxyethyl methacrylate, of the photoresist. The acid value, viscosity, molecular weight and thermal properties of the formed binders were measured. Then, surface-modified silica particles prepared by the sol–gel method were introduced to the photoresist. Because the modified silica particles contained considerable amount of reactive double bonds (CC) on their surfaces, they would react with the polyfunctional monomers in the photoresist to form an organic–inorganic nanohybrid. Fourier transform infrared spectrometer was used to analyze the evolution of chemical bonds at various stages of the preparation process. Thermal analyses including thermal gravimetric analyzer, differential scanning calorimeter and thermo-mechanical analyzer were used to evaluate the level of enhancement on thermal and dimensional stabilities of the photoresist due to silica incorporation.
關鍵字 Photoresist; Binder; Sol–gel method; Organic–inorganic nanohybrid
語言 en
ISSN 0040-6090
期刊性質 國外
收錄於 SCI EI
產學合作
通訊作者
審稿制度
國別 CHE
公開徵稿
出版型式 紙本
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