Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
學年 97
學期 2
出版（發表）日期 2009-02-01
作品名稱 Manufacture of a polyaniline nanofiber ammonia sensor integrated with a readout circuit using the CMOS-MEMS technique
作品名稱（其他語言）
著者 Liu, Mao-chen; Dai, Ching-liang; Chan, Chih-hua; Wu, Chyan-chyi
單位 淡江大學機械與機電工程學系
出版者 Basel: Molecular Diversity Preservation International
著錄名稱、卷期、頁數 Sensors 9(2), pp.869-880
摘要 This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature
關鍵字
語言 en
ISSN 1424-8220 1424-8239
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Dai, Ching-liang
審稿制度 否
國別 CHE
公開徵稿
出版型式 ,電子版
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