教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:A Micromachined Microwave Switch Fabricated by the Complementary Metal Oxide Semiconductor Post-Process of Etching Silicon Dioxide
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出版(發表)日期2005/01/01
作品名稱A Micromachined Microwave Switch Fabricated by the Complementary Metal Oxide Semiconductor Post-Process of Etching Silicon Dioxide
作品名稱(其他語言)
著者Dai, Ching-liang; Peng, Hsuan-jung; Liu, Mao-chen; Wu, Chyan-chyi; Hsu, Heng-ming; 楊龍杰; Yang, Lung-jieh
單位淡江大學機械與機電工程學系
出版者Japan Society of Applied Physics
著錄名稱、卷期、頁數Japanese Journal of Applied Physics 44(9A), pp.6804-6809
摘要In this study, we investigate the fabrication of a micromachined microwave switch using the commercial 0.35 μm double polysilicon four metal (DPFM) complementary metal oxide semiconductor (CMOS) process and the post-process of only one maskless wet etching. The post-process has merits of easy execution and low cost. The post-process uses an etchant (silox vapox III) to etch the silicon dioxide layer to release the suspended structures of the microwave switch. The microwave switch is a capacitive type that is actuated by an electrostatic force. The components of the microwave switch are coplanar waveguide (CPW) transmission lines, a suspended membrane and supported springs. Experimental results show that the driving voltage of the switch is about 17 V. The switch has an insertion loss of −2.5 dB at 50 GHz and an isolation of −15 dB at 50 GHz.
關鍵字microwave switch; CMOS; post-process
語言英文
ISSN0021-4922;1347-4065
期刊性質國外
收錄於SCI
產學合作
通訊作者
審稿制度
國別日本
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出版型式紙本
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