A PDMS-Based Thermopneumatic Micropump with Parylene Inner Walls
學年 96
學期 2
發表日期 2008-06-22
作品名稱 A PDMS-Based Thermopneumatic Micropump with Parylene Inner Walls
作品名稱（其他語言）
著者 Lin, Tzu-Yuan; Ou, Yu-Cheng; Yang, Lung-Jieh
作品所屬單位 淡江大學機械與機電工程學系
出版者
會議名稱 The 4th Asia Pacific Conference on Transducers and Micro：Nano Technologies(APCOT 2008)
會議地點 臺南, 臺灣
摘要 A thermopneumatic valveless micropump with a PDMS-based nozzle/diffuser structure was firstly designed and realized herein by stacking three layers of PDMS on a glass slide. Unlike the conventional peristaltic pumping configuration, the new structure of the micropump shown in Fig. 1 consists of only one set of heater on the glass slide, a thermopneumatic actuation chamber, and an actuation diaphragm. Additionally it includes a microchannel with nozzle/diffuser structure and inlet/outlet ports. In this valveless microchannel, fluid is driven by asymmetric flow resistance produced from the nozzle/diffuser configuration. The actuation diaphragm between the gas-pneumatic chamber and the flowing channel can bend up and down by exploiting air expansion that is induced by increasing heater temperature. PDMS has good characteristics: it is cheap, transparent, easy to fabricate and biocompatible. But in the micropump, the porosity of PDMS causes several critical problems such as bubble formation and sample evaporation. To solve those problems, we coated the micropump with parylene film, which has low permeability to moisture.
關鍵字 PDMS;Parylene;Valveless;Micropump;Nozzle;Diffuser
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20080622~20080625
通訊作者
國別 TWN
公開徵稿 Y
出版型式 紙本
出處 Proceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008)，4p.
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