Adjustable Wetting Behavior of Parylene Surface Using to Liquid-Droplet Locomotion
學年 96
學期 2
發表日期 2008-06-22
作品名稱 Adjustable Wetting Behavior of Parylene Surface Using to Liquid-Droplet Locomotion
作品名稱(其他語言)
著者 He, Guo-Yuan; Yang, Lung-Jieh
作品所屬單位 淡江大學機械與機電工程學系
出版者
會議名稱 The 4th Asia Pacific Conference on Transducers and Micro:Nano Technologies(APCOT 2008)
會議地點 臺南, 臺灣
摘要 This paper demonstrated the plasma treatment of only 10 seconds on the parylene surface for changing its wetting behavior. CF4 and SF6 plasma gasses could increase the contact angle (of water) remarkably from 74 degree (lightly hydrophilic) to 123 degree (hydrophobic), whereas O2 plasma could reversely decrease the contact angle greatly from 75 degree to almost 0 degree (highly hydrophilic). The former can be applied to making the hydrophobic surface for driving liquid droplets, and the later can enhance the automatically filling flow caused by capillary suction. We apply the former to the micro-pillar array devices, and the max moving velocity of droplet is 23.06 mm/sec. Moreover, we also compared it with micro-pillar array which was modified by vapor of HMDS in this paper.
關鍵字 Plasma;CF4;SF6;O2;Hydrophobic;Hydrophilic
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20080622~20080625
通訊作者
國別 TWN
公開徵稿 Y
出版型式 紙本
出處 Proceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008),4p.
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/96429 )

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