A Gas-Leakage Sensor for PDMS Chip Frames
學年 96
學期 2
發表日期 2008-06-22
作品名稱 A Gas-Leakage Sensor for PDMS Chip Frames
作品名稱（其他語言）
著者 Yang, Meng-Chiao; Yang, Lung-Jieh; Wang, Hsin-Hsiung
作品所屬單位 淡江大學機械與機電工程學系
出版者
會議名稱 The 4th Asia Pacific Conference on Transducers and Micro：Nano Technologies(APCOT 2008)
會議地點 臺南, 臺灣
摘要 This paper proposes a new methodology to detect the gas-leakage and the corresponding diffusion coefficient of PDMS. We use PDMS instead of Pyrex 7740 glass to seal the backside V-groove of pressure sensor chips. We put the sensor into a pressure testing machine and pressurize with CO2 at 300 psi. By observing output voltage, the time of CO2 permeated into cavity of the sensor was easily to find. In this paper, we use two PDMS membrane with different thickness, 45.mu.m and 500.mu.m, to package the sensors and explore the gas-leakage of PDMS membrane. The mathematical model for the leaking process shows that the diffusion coefficients D are 7.49*10/sup -10/m2 /sec for 45.mu.m thick PDMS and 1.38*10/sup -9/m2 /sec for 500.mu.m thick PDMS, respectively.
關鍵字 PDMS;Gas-leakage;Diffusion coefficient
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20080622~20080625
通訊作者
國別 TWN
公開徵稿 Y
出版型式 紙本
出處 Proceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008)，4p.
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