Fabricating microstructures on CVD diamond film
學年 100
學期 1
出版（發表）日期 2012-01-01
作品名稱 Fabricating microstructures on CVD diamond film
作品名稱（其他語言）
著者 Chao, Choung-Lii; Chou, Wen-Chen; Lin, Wen-Chung; Su, Wei-Jhe; Ma, Kung-Jeng
單位 淡江大學機械與機電工程學系
出版者 Olney: Inderscience Publishers
著錄名稱、卷期、頁數 International Journal of Surface Science and Engineering 6(1/2), pp.59-70
摘要 Diamond has many advanced properties which may provide potential solutions to various engineering problems. This study focuses on fabricating micro-structures on CVD diamond film. A thin layer of Au or Pt together with thermal annealing process is used to form micro–masks and reactive ion etching (RIE) method was subsequently adopted in this research to etch and fabricate micro–structures. Field emission scanning electron microscope (FESEM) and micro Raman spectroscopy were used to observe and analyse the morphology and composition of the obtained microstructures. Results show that different coated materials and thickness can produce different types of micro–masks and, as a consequence, different microstructures. Depending on the micro–mask, whisker–like or pillar–like microstructures are successfully produced and, based on the micro Raman spectrum; these microstructures still retains good diamond quality.
關鍵字 CVD diamond film; thermal annealing; reactive ion etching; RIE; microstructure
語言 en
ISSN 1749-785X; 1749-7868
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Chao, Choung–Lii
審稿制度 是
國別 GBR
公開徵稿
出版型式 紙本
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/89052 )

機構典藏連結
SDGS 產業創新與基礎設施