Design and fabrication of a diaphragm type thermo-buckled microactuators
學年 94
學期 1
發表日期 2006-01-18
作品名稱 Design and fabrication of a diaphragm type thermo-buckled microactuators
作品名稱（其他語言）
著者 Wang, Jiun-Min; Lin, Hung-Hua; Lin, Yue-Jheng; Ou, Yu-Cheng; Yang, Lung-Jieh; Lin, Chii-Wann; Yang, Yao-Joe; Lin, Wei-Chih
作品所屬單位 淡江大學機械與機電工程學系
出版者
會議名稱 Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
會議地點 Zhuhai, China
摘要 This study presents a novel diaphragm type thermo- buckled microactuator with only a driving voltage of 3 V and under a working temperature far below 100degC. It's a sandwich structure composed of a platinum (Pt) resistor between two parylene films with different thickness. The platinum resistor is assigned as a heating source. Therefore, the parylene diaphragm with different thicknesses of top and bottom layers is heated by the embedded Pt resistor. The non-uniform temperature rise of the parylene diaphragm not only generates an out-of-plane thermo-buckling deformation, but also induces an asymmetric deflection inclined to upward or downward direction. The maximum displacement of the diaphragm is 0.4 mum and the cutoff frequency is 1000 Hz by a driving voltage of 3 V.
關鍵字 microactuator;parylene;thermo-buckled
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20060118~20060121
通訊作者
國別 CHN
公開徵稿 Y
出版型式 紙本
出處 o/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on, pp.873-876
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/92166 )

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