Polarized angular dependence of three-dimensional light-scattering for nanoparticles on thin film wafer
學年 102
學期 1
出版（發表）日期 2013-09-03
作品名稱 Polarized angular dependence of three-dimensional light-scattering for nanoparticles on thin film wafer
作品名稱（其他語言）
著者 Liu, Cheng-Yang
單位 淡江大學機械與機電工程學系
出版者 Jena: Urban und Fischer Verlag
著錄名稱、卷期、頁數 Optik - International Journal for Light and Electron Optics 124(21), pp.4901–4908
摘要 Bidirectional ellipsometry has been developed as a technique for distinguishing among various scattering features near surfaces. The polarized angular dependence of three-dimensional light-scattering by the nanoparticles on thin film wafer is calculated and measured. These calculations and measurements yield angular dependence of bidirectional ellipsometric parameters for out-of-plane light-scattering. The experimental data show good agreement with theoretical predictions for different nanoparticle diameters and thin film thicknesses when bidirectional ellipsometry was employed to measure nanoparticles (60 nm, 100 nm, and 200 nm) on Si wafers with different film thicknesses of 2 nm, 5 nm, and 10 nm. Not only are the diameters of the nanoparticles determined, but also the film thicknesses can be calculated and distinguished from the measurement results. Additionally, the results indicate that improved accuracy is possible for measurements of scattering features from nanoparticles and thin films.
關鍵字 nanoparticles; thin film; light scattering; polarization
語言 en
ISSN 0030-4026
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Liu, Cheng-Yang
審稿制度 是
國別 DEU
公開徵稿
出版型式 紙本
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