Fabrication and optical characteristics of silicon-based two-dimensional photonic crystal Mach–Zehnder interferometers
學年 96
學期 2
出版(發表)日期 2008-06-01
作品名稱 Fabrication and optical characteristics of silicon-based two-dimensional photonic crystal Mach–Zehnder interferometers
作品名稱(其他語言)
著者 Liu, Cheng-Yang
單位 淡江大學機械與機電工程學系
出版者 Amsterdam: Elsevier BV * North-Holland
著錄名稱、卷期、頁數 Physica E: Low-dimensional Systems and Nanostructures 40(8), pp.2800-2804
摘要 Photonic crystals have many potential applications because of their ability to control light-wave propagation. We report on the fabrication and properties of quasi-two-dimensional photonic crystals with triangular lattices of dielectric rods in air. Rod-type photonic crystal structures were fabricated in silicon by electron beam lithography and dry-etching techniques. Mach–Zehnder interferometers were fabricated from two-dimensional photonic crystal waveguides. Transmission spectra were measured and device operation was shown to be in agreement with theoretical calculations. The interferometers can be used in the visible light region. Such an approach to photonic element systems should enable new applications for designing components in photonic integrated circuits.
關鍵字 Photonic crystal;Mach–Zehnder interferometer;Electron beam lithography
語言 en
ISSN 1386-9477
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Liu, Cheng-Yang
審稿制度
國別 NLD
公開徵稿
出版型式 紙本
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