Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
學年 97
學期 2
出版(發表)日期 2009-06-01
作品名稱 Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
作品名稱(其他語言)
著者 Chen, Chun Chieh; Chao, Choung Lii; Hsu, Wei Yao; Chen, Fong Chi; Chao, Chung Woei
單位 淡江大學機械與機電工程學系
出版者 Stafa-Zurich: Trans tech publications
著錄名稱、卷期、頁數 Advanced Materials Research 76-78, pp.479-484
摘要 Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses.
關鍵字 Aspheric lens;Aspheric micro lens;Diamond turning;Filling factor;Form accuracy;Micro-lens arrays;Opto-electronics;Slow tool servos;Toolpaths;Ultra precision;Abrasives;Aspherics;Diamonds;Microlenses;Optical instrument lenses;Surface roughness;Turning
語言 en
ISSN 1022-6680
期刊性質 國外
收錄於 EI
產學合作
通訊作者 Chen, Chun Chieh
審稿制度
國別 CHE
公開徵稿
出版型式 電子版
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