Fabrication of Aspheric Micro Lens Array by Slow Tool Servo | |
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學年 | 97 |
學期 | 2 |
出版(發表)日期 | 2009-06-01 |
作品名稱 | Fabrication of Aspheric Micro Lens Array by Slow Tool Servo |
作品名稱(其他語言) | |
著者 | Chen, Chun Chieh; Chao, Choung Lii; Hsu, Wei Yao; Chen, Fong Chi; Chao, Chung Woei |
單位 | 淡江大學機械與機電工程學系 |
出版者 | Stafa-Zurich: Trans tech publications |
著錄名稱、卷期、頁數 | Advanced Materials Research 76-78, pp.479-484 |
摘要 | Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses. |
關鍵字 | Aspheric lens;Aspheric micro lens;Diamond turning;Filling factor;Form accuracy;Micro-lens arrays;Opto-electronics;Slow tool servos;Toolpaths;Ultra precision;Abrasives;Aspherics;Diamonds;Microlenses;Optical instrument lenses;Surface roughness;Turning |
語言 | en |
ISSN | 1022-6680 |
期刊性質 | 國外 |
收錄於 | EI |
產學合作 | |
通訊作者 | Chen, Chun Chieh |
審稿制度 | |
國別 | CHE |
公開徵稿 | |
出版型式 | 電子版 |
相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65306 ) |
SDGS | 產業創新與基礎設施 |