A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures
學年 91
學期 2
出版(發表)日期 2003-03-01
作品名稱 A Study of Viscous Air Damping in Laterally Oscillating Micro Comb Structures
作品名稱(其他語言)
著者 陳慶祥; Chen, Ching-shung; 楊龍杰; Yang, Lung-jieh; Chou, C. F.
單位 淡江大學航空太空工程學系
出版者 臺南市:中國航空太空學會
著錄名稱、卷期、頁數 中國航空太空學會學刊=Transactions of the Aeronautical and Astronautical Society of the Republic of China 35(1),頁99-105
摘要 This paper studies analytically as well as numerically viscous air damping in laterally oscillating micro comb structures. The analytical results demonstrate that the transient motion is damped out in less than one oscillating period of the comb structures studied. The Knudsen numbers in typical micro comb structures indicate part of the flow falling in the slip flow region. The slip effect is also studied. The predicted quality factors subject to the slip and the nonslip boundary conditions are both larger than the experimental data. The possible explanation for this discrepancy is that our solution procedure assumes that the structure is infinite, while an actual structure is finite and three-dimensional. The pumping and sucking motions at the edges of the comb fingers have significant effects on the flow field.
關鍵字
語言 en
ISSN 1022-0666
期刊性質 國內
收錄於 EI
產學合作
通訊作者
審稿制度
國別 TWN
公開徵稿
出版型式 紙本
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