| Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD | |
|---|---|
| 學年 | 98 |
| 學期 | 2 |
| 出版（發表）日期 | 2010-05-01 |
| 作品名稱 | Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD |
| 作品名稱（其他語言） | |
| 著者 | Teng, Chien-chung; Ku, Feng-chi; Sung, Chien-min; Deng, Jin-pei; Chien, Su-fang; Song, Shin-min; Lin, Chhiu-tsu |
| 單位 | 淡江大學化學學系 |
| 出版者 | New York: Hindawi Publishing Corporation |
| 著錄名稱、卷期、頁數 | Journal of Nanomaterials 2010, 365614(8pages) |
| 摘要 | Four different catalysts, nanodiamond seed, nano-Ni, diamond powder, and mixture of nano-Ni/diamond powder, were used to activate Si wafers for diamond film growth by hot-filament CVD (HFCVD). Diamond crystals were shown to grow directly on both large diamond powder and small nanodiamond seed, but a better crystallinity of diamond film was observed on the ultrasonicated nanodiamond seeded Si substrate. On the other hand, nano-Ni nanocatalysts seem to promote the formation of amorphous carbon but suppress transpolyacetylene (t-PA) phases at the initial growth of diamond films. The subsequent nucleation and growth of diamond crystals on the amorphous carbon layer leads to generation of the spherical diamond particles and clusters prior to coalescence into continuous diamond films based on the CH3 addition mechanism as characterized by XRD, Raman, ATR/FT-IR, XPS, TEM, SEM, and AFM techniques. Moreover, a 36% reduction in surface roughness of diamond film assisted by nano-Ni catalyst is quite significant. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 1687-4110 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Lin, Chhiu-tsu |
| 審稿制度 | 是 |
| 國別 | USA |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/61573 ) |
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