| Nanocrystalline diamond microstructures from Ar/H2/CH4-plasma chemical vapour deposition | |
|---|---|
| 學年 | 99 |
| 學期 | 1 |
| 出版（發表）日期 | 2011-01-01 |
| 作品名稱 | Nanocrystalline diamond microstructures from Ar/H2/CH4-plasma chemical vapour deposition |
| 作品名稱（其他語言） | |
| 著者 | Lin, I-Nan; Chen, Huang-Chin; Wang, Chuang-Shern; Lee, Yun-Rue; Lee, Chi-Young |
| 單位 | 淡江大學物理學系 |
| 出版者 | Cambridge: R S C Publications |
| 著錄名稱、卷期、頁數 | CrystEngComm 13(20), pp.6082-6089 |
| 摘要 | The incorporation of H2 into Ar plasma was observed to markedly alter the microstructure of diamond films. The addition of a small percentage of H2 (<1.5%) into the Ar plasma leads to the presence of stacking faults in plate-like diamond grains, the incorporation of 75% H2 induces the formation of the diamond polymorph (8H). Optical emission spectroscopy indicated that addition of H2 into the Ar/CH4 plasma decreased the CH/C2 ratio and increased the proportion of atomic hydrogen. The small proportion of atomic hydrogen in 1.5%H2–Ar plasma can only induce the formation of (111) stacking faults, resulting in scarcely distributed plate-like diamond grains. The large proportion of atomic hydrogen in 75%H2–Ar plasma causes the rapid growth of diamond grains, leading to the formation of polymorphs of diamond lattices. The tuning on the microstructure of the UNCD films by incorporating either small or large amounts of H2 in Ar-plasma can be attributed to the interaction of H-species with the grain boundary hydrocarbons. Such a capability opens up the potential for applications of UNCD films. Despite the complication in granular structure resulted from the CH4/(Ar–H2) plasma chemical vapour deposition, the formation of microstructures can be explained by the same pathway, the competition of the processes (i) formation of a hydrocarbon passivation layer and the re-activation of the hydrocarbon layer and (ii) secondary nucleation and the enlargement of diamond grains. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 1466-8033 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Lee, Chi-Young |
| 審稿制度 | |
| 國別 | GBR |
| 公開徵稿 | |
| 出版型式 | 電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/73502 ) |
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