Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip
學年 98
學期 2
出版（發表）日期 2010-04-01
作品名稱 Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip
作品名稱（其他語言）
著者 Dai, Ching-liang; Chen, Yen-chi; Wu, Chyan-chyi; Kuo, Chin-fu
單位 淡江大學機械與機電工程學系
出版者 Basel: MDPI AG
著錄名稱、卷期、頁數 Sensors 10(3), pp.1753-1764
摘要 The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.
關鍵字 micro carbon monoxide sensor; cobalt oxide film; readout circuit
語言 en
ISSN 1424-8239 1424-8220
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Dai, Ching-liang
審稿制度
國別 CHE
公開徵稿
出版型式 電子版
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