| A circular microchannel integrated with embedded spiral electrodes using for fluid transportation | |
|---|---|
| 學年 | 96 |
| 學期 | 1 |
| 出版（發表）日期 | 2007-09-12 |
| 作品名稱 | A circular microchannel integrated with embedded spiral electrodes using for fluid transportation |
| 作品名稱（其他語言） | |
| 著者 | 楊龍杰; Yang, Lung-jieh; Ko, K.-C.; Wang, J.-M. |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | |
| 著錄名稱、卷期、頁數 | Sensors and Actuators A: Physical 139, pp.172-177 |
| 摘要 | This paper proposes a novel method to fabricate a circular microchannel with embedded spiral electrodes used for fluid transportation by inserting glass capillary as sacrificial mould. Utilizing a rolling exposure technique in the photolithography process, the continuous spiral electrode has been formed on the non-planar surface of a glass capillary successfully. Moreover, using the concept of sacrificial layer, the spiral electrodes are transferred on the inner surface of a SU-8 circular microchannel with a diameter of 350 μm. The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 μl/min herein. |
| 關鍵字 | Circular microchannel;Spiral electrodes;Rolling exposure;Electrohydrodynamic (EHD) |
| 語言 | en |
| ISSN | 0924-4247 |
| 期刊性質 | 國外 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | NLD |
| 公開徵稿 | |
| 出版型式 | ,電子版,紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65257 ) |
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