教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:A circular microchannel integrated with embedded spiral electrodes using for fluid transportation
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學期
出版(發表)日期2007/09/12
作品名稱A circular microchannel integrated with embedded spiral electrodes using for fluid transportation
作品名稱(其他語言)
著者楊龍杰; Yang, Lung-jieh; Ko, K.-C.; Wang, J.-M.
單位淡江大學機械與機電工程學系
出版者
著錄名稱、卷期、頁數Sensors and Actuators A: Physical 139, pp.172-177
摘要This paper proposes a novel method to fabricate a circular microchannel with embedded spiral electrodes used for fluid transportation by inserting glass capillary as sacrificial mould. Utilizing a rolling exposure technique in the photolithography process, the continuous spiral electrode has been formed on the non-planar surface of a glass capillary successfully. Moreover, using the concept of sacrificial layer, the spiral electrodes are transferred on the inner surface of a SU-8 circular microchannel with a diameter of 350 μm. The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 μl/min herein.
關鍵字Circular microchannel;Spiral electrodes;Rolling exposure;Electrohydrodynamic (EHD)
語言英文
ISSN0924-4247
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國別荷蘭
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