教師資料查詢 | 類別: 期刊論文 | 教師: 楊龍杰YANG LUNG-JIEH (瀏覽個人網頁)

標題:On gas-permeation in PDMS
學年99
學期1
出版(發表)日期2010/10/01
作品名稱On gas-permeation in PDMS
作品名稱(其他語言)
著者Yang, Lung-Jieh
單位淡江大學機械與機電工程學系
出版者Bristol: Institute of Physics Publishing Ltd.
著錄名稱、卷期、頁數Journal of Micromechanics and Microengineering 20(11), 115033(7pages)
摘要A theoretical model of gas permeation in polydimethylsiloxane (PDMS) is conducted for two prior works involving MEMS sensors and actuators. The issue for modeling a sensor is about using PDMS slabs to replace Pyrex glass as the packaging substrate for bulk-micromachined pressure sensors. The leakage pressure due to gas permeation in PDMS reveals the time-varying behavior of exponential decay. The issue for modeling an actuator is the flow rate in a PDMS-based gas permeation pump. The nonlinear dependence of the flow rate with the diffusion area can be explained by this model. The prediction of this theoretical result is therefore in qualitative agreement with two previous experimental data sets by a conventional curve-fitting technique.
關鍵字
語言英文
ISSN0960-1317; 1361-6439
期刊性質國外
收錄於SCI;EI
產學合作
通訊作者Yang, Lung-Jieh
審稿制度
國別英國
公開徵稿
出版型式
相關連結
SDGs
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