Enhanced electron field emission properties by tuning the microstructure of ultrananocrystalline diamond film
學年 99
學期 2
出版（發表）日期 2011-02-01
作品名稱 Enhanced electron field emission properties by tuning the microstructure of ultrananocrystalline diamond film
作品名稱（其他語言）
著者 Cheng, Hsiu-fung; Chiang, Horng-yi; Horng, Chuang-chi; Chen, Huang-chin; Wang, Chuan-sheng; Lin, I-nan
單位 淡江大學物理學系
出版者 College Park: American Institute of Physics
著錄名稱、卷期、頁數 Journal of Applied Physics 109(3), 033711(8pages)
摘要 Synthesis of microcrystalline-ultrananocrystalline compositediamond (MCD-UNCD) films, which exhibit marvelous electron field emission (EFE) properties, was reported. The EFE of MCD-UNCD compositediamondfilm can be turned on at a low field as 6.5 V/μm and attain large EFE current density about 1.0 mA/cm2 at 30 V/μm applied field, which is better than the EFE behavior of the nondoped planar diamondfilms ever reported. The MCD-UNCD films were grown by a two-step microwave plasma enhanced chemical vapor deposition (MPECVD) process, including forming an UNCD layer in CH4/Ar plasma that contains no extra H2, followed by growingMCD layer using CH4/H2/Ar plasma that contains large proportion of H2. Microstructure examinations using high resolution transmission electron microscopy shows that the secondary MPECVD process modifies the granular structure of the UNCD layer, instead of forming a large grain diamond layer on top of UNCDfilms. The MCD-UNCD compositediamondfilms consist of numerous ultrasmall grains (∼5 nm in size), surrounding large grains about hundreds of nanometer in size. Moreover, there exist abundant nanographites in the interfacial region between the grains that were presumed to form interconnected channels for electron transport, resulting in superior EFE properties for MCD-UNCD compositefilms.
關鍵字
語言 en
ISSN 0021-8979 1089-7550
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Lin, I-nan
審稿制度
國別
公開徵稿
出版型式 電子版 紙本
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