The testing machine for micro-sensors subjected to different states of pressure and temperature
學年 93
學期 2
發表日期 2005-07-10
作品名稱 The testing machine for micro-sensors subjected to different states of pressure and temperature
作品名稱（其他語言）
著者 Yang, Lung-jieh; Wang, Hsin-hsiung; Liao, Wei-hao; Huang, Han-wei; Chang, Chih-cheng
作品所屬單位 淡江大學機械與機電工程學系
出版者 N.Y.: Institute of Electrical and Electronic Engineers (IEEE)
會議名稱 Mechatronics, 2005. ICM '05. IEEE International Conference on
會議地點 Taipei, Taiwan
摘要 The primary purpose of this research is to design and build up a test machine which provides a testing environment for semiconductor micro sensors made by micro-electro-mechanical systems (MEMS) technique. It combines computer auxiliary software SPARTAN into the global data-gathering system in addition to the main frame of the pressurized chamber. Different states of temperature and pressure subject to the testing of commercial pressure sensors was not only successfully achieved but the real-time sampling of the MEMS sensor output also worked well.
關鍵字
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20050710~20050712
通訊作者
國別 TWN
公開徵稿
出版型式
出處 Mechatronics, 2005. ICM '05. IEEE International Conference on, pp.805-810
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/38036 )

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