Study of Evaporation Phenomena in Micro Channels
學年 94
學期 1
發表日期 2006-01-18
作品名稱 Study of Evaporation Phenomena in Micro Channels
作品名稱（其他語言）
著者 Chou, Yen-chih; Chen, Yu-tang; Kang, Shung-wen
作品所屬單位 淡江大學機械與機電工程學系
出版者 N.Y.: Institute of Electrical and Electronic Engineers (IEEE)
會議名稱 Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
會議地點 Zhuhai, China
摘要 Two-phase convective flow in micro channels has numerous promising applications such as electronic cooling. This study investigates evaporation phenomena and capillary-driven heat in a rectangular micro channels structure with hydraulic diameters of 100 ~ 250nm and length of 75mm. The micro channels made of (110)-orientated silicon is fabricated by bulk micromachining. The temperature distributions in micro channels chip structure, as well as the induced evaporation mass flow rate of water, were measured under different heat flux and inclination angle. Thermal resistances were calculated to evaluate the chip cooling performance. The experimental results show that with an increase of the imposed heat flux, the evaporation mass flow rate increases and thermal resistance decreases. The effect of channel sizes and inclination angle on the heat transfer characteristics are also examined
關鍵字 evaporation; micro channels; inclination angle; thermal resistance
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20060118~20060121
通訊作者
國別 CHN
公開徵稿
出版型式 紙本 電子版
出處 Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on, pp.446-449
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