Bonding properties and their relation to residual stress and refractive index of amorphous Ta(N, O) films investigated by x-ray absorption spectroscopy
學年 95
學期 1
申請日期 2006-08-01
得獎人員 彭維鋒 Pong, Way-faung
得獎論文名稱 Bonding properties and their relation to residual stress and refractive index of amorphous Ta(N, O) films investigated by x-ray absorption spectroscopy
得獎等級 0
所屬類別 0
出版者
研究獎勵類別 2
備註
發表日期 1900-01-01