Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film
學年 93
學期 2
出版(發表)日期 2005-03-01
作品名稱 Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film
作品名稱(其他語言)
著者 李彥志; Lee, Y. C.; Lin, S. J.; Chia, C. T.; Cheng, H. F.; 林諭男; Lin, I-nan
單位 淡江大學物理學系
出版者 Elsevier
著錄名稱、卷期、頁數 Diamond and Related Materials 14(3-7), pp.296-301
摘要 The nucleation behavior of nanodiamond films and the associated electron field emission properties were investigated. Among the important CVD parameters, the methane/hydrogen ratio and the total pressure impose most markedly effect, whereas the microwave power and the boron content show least significant effect on the nucleation behavior for the nanodiamonds. Presumably, the prime factor modifying the rate of formation of diamond nuclei is the proportion of C+- and H+-species contained in the plasma. The bias voltage applied for nucleation of diamonds show more marked effect on improving the electron field emission capacity for the nanodiamonds than the boron-content does. It is ascribed to the increase in proportion of grain boundaries, as the grain boundaries are highly conductive and are good emission sites.
關鍵字 Nanodiamond;Bias enhanced nucleation and growth;Electron field emission
語言 en
ISSN 0925-9635
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度
國別 CHE
公開徵稿
出版型式 ,紙本
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