Comparative study of nucleation processes for the growth of nanocrystalline diamond
學年 94
學期 2
出版(發表)日期 2006-02-01
作品名稱 Comparative study of nucleation processes for the growth of nanocrystalline diamond
作品名稱(其他語言)
著者 劉彥崗; Liu, Y. K.; Tso, P. L.; 林諭男; Lin, I-nan; Tzeng, Y.; Chen, Y. C.
單位 淡江大學物理學系
出版者 Elsevier
著錄名稱、卷期、頁數 Diamond and Related Materials 15(2-3), pp.234-238
摘要 Methods for seeding silicon substrates with pretreatments and the in situ generation of diamond nuclei by the bias enhanced nucleation (BEN) have been studied to examine their effects on the nucleation density as well as the morphology of grown and seeded sides, the growth rate, and the quality of nanocrystalline diamond films. Pretreatments including mechanical abrasion by diamond paste, exposure of the silicon substrate to a hydrocarbon plasma, and ultrasonication of silicon in solvents with suspended nano- or micro-diamond powders were studied. With an optimized diamond seeding or nucleation process, ultra-thin, smooth and homogenous nanocrystalline diamond films can be fabricated.
關鍵字 Nanocrystalline diamond;NCD;Nucleation;MPCVD
語言 en
ISSN 0925-9635
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度
國別 TWN
公開徵稿
出版型式 ,電子版
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