| Comparative study of nucleation processes for the growth of nanocrystalline diamond | |
|---|---|
| 學年 | 94 |
| 學期 | 2 |
| 出版（發表）日期 | 2006-02-01 |
| 作品名稱 | Comparative study of nucleation processes for the growth of nanocrystalline diamond |
| 作品名稱（其他語言） | |
| 著者 | 劉彥崗; Liu, Y. K.; Tso, P. L.; 林諭男; Lin, I-nan; Tzeng, Y.; Chen, Y. C. |
| 單位 | 淡江大學物理學系 |
| 出版者 | Elsevier |
| 著錄名稱、卷期、頁數 | Diamond and Related Materials 15(2-3), pp.234-238 |
| 摘要 | Methods for seeding silicon substrates with pretreatments and the in situ generation of diamond nuclei by the bias enhanced nucleation (BEN) have been studied to examine their effects on the nucleation density as well as the morphology of grown and seeded sides, the growth rate, and the quality of nanocrystalline diamond films. Pretreatments including mechanical abrasion by diamond paste, exposure of the silicon substrate to a hydrocarbon plasma, and ultrasonication of silicon in solvents with suspended nano- or micro-diamond powders were studied. With an optimized diamond seeding or nucleation process, ultra-thin, smooth and homogenous nanocrystalline diamond films can be fabricated. |
| 關鍵字 | Nanocrystalline diamond;NCD;Nucleation;MPCVD |
| 語言 | en |
| ISSN | 0925-9635 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/27470 ) |
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