Transparent ultrananocrystalline diamond films on quartz substrate
學年 96
學期 2
出版（發表）日期 2008-04-01
作品名稱 Transparent ultrananocrystalline diamond films on quartz substrate
作品名稱（其他語言）
著者 Joseph, P. T.; Tai, Nyan-hwa; Chen, Yi-chun; Cheng, Hsiu-fung; 林諭男; Lin, I-nan
單位 淡江大學物理學系
出版者 Elsevier
著錄名稱、卷期、頁數 Diamond and Related Materials 17(4-5), pp.476-480
摘要 Highly transparent ultrananocrystalline diamond (UNCD) films were deposited on quartz substrates using microwave plasma enhanced chemical vapor deposition (MPECVD) method. Low temperature growth of high quality transparent UNCD films was achieved by without heating the substrates prior to the deposition. Additionally, a new method to grow NCD and microcrystalline diamond (MCD) films on quartz substrates has been proposed. Field emission scanning electron microscopy (FESEM) and Raman spectroscopy were used to analyze the surface and structural properties of the films. The surface morphology of UNCD film shows very smooth surface characteristics. The transparent property studies of UNCD film on quartz substrate showed 90% transmittance in the near IR region. The transparent and dielectric properties of UNCD, NCD, and MCD films on quartz substrates were compared and reported.
關鍵字
語言 en
ISSN 0925-9635
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度 否
國別 CHE
公開徵稿
出版型式 ,電子版
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