教師資料查詢 | 類別: 期刊論文 | 教師: 許世杰 Hsu, Shih-chieh (瀏覽個人網頁)

標題:Study on thermoelectric property optimization of mixed-phase bismuth telluride thin films deposited by co-evaporation process
學年108
學期2
出版(發表)日期2020/03/26
作品名稱Study on thermoelectric property optimization of mixed-phase bismuth telluride thin films deposited by co-evaporation process
作品名稱(其他語言)
著者Yen-Ju Wu; Shih-Chieh Hsu; Ya-Cheng Lin; Yibin Xu; Tung-Han Chuang; Sheng-Chi Chen
單位
出版者
著錄名稱、卷期、頁數Surface & Coatings Technology 394, 125694
摘要The development of Bi2Te3 thin films has huge potential in the pursuit of efficient thermoelectric micro/na-
nodevices due to their high Seebeck coefficient, high electrical conductivity and low thermal conductivity. The

optimization of experimental parameters of Bi-Te thin films produced by co-evaporation will be investigated in
this study. Co-evaporation is a low cost, easy-to-control process which can be used for high throughput and is

scalable. We found that an optimal Te/Bi ratio of 1.5 with good thermoelectric properties can be directly syn-
thesized by Bi and Bi2Te3 co-evaporation. Compared to the conventional Bi/Te co-evaporation process, high

temperature annealing or substrate heating is not necessary for the process mentioned in this paper, which is a
desirable feature when using polymer-based substrates, organic/inorganic hybrid thermoelectric generators, and
flexible devices since they have relatively low tolerance to heat. The optimized Bi2Te3 thin films, which are
mixed phases of Bi2Te3, Bi3Te4 and Te, possess high carrier concentration (6.65 × 1020 cm−3), low electrical
resistivity (3.17 × 10−3 Ωcm), and extremely low thermal conductivity (0.59 W/mK) at room temperature on a
smooth surface (roughness <5.5 nm) and are achieved by adjusting the deposition rate of Bi and Bi2Te3. The
correlation between the structures of mixed phases, electrical and thermal properties will be discussed in detail.
關鍵字Bi2Te3;Thermoelectric properties;Co-evaporation;Thin films;Mixed phases
語言英文(美國)
ISSN1879-3347
期刊性質國外
收錄於SCI;
產學合作
通訊作者
審稿制度
國別荷蘭
公開徵稿
出版型式,電子版
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