教師資料查詢 | 類別: 期刊論文 | 教師: 王建凱 Chien-Kai Wang (瀏覽個人網頁)

標題:Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries
學年106
學期1
出版(發表)日期2017/09/28
作品名稱Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries
作品名稱(其他語言)
著者Chien-Kai Wang; Wei-Hao Liao; Hsiao-Mei Wu; Yuan-Hsiu Lo; Ting-Ru Lin; Yi-Chung Tung
單位
出版者
著錄名稱、卷期、頁數Journal of Micromechanics and Microengineering 27 (2017) 115003 (9pp)
摘要Polydimethylsiloxane (PDMS) has become a widely used material to construct microfluidic devices for various biomedical and chemical applications due to its desired material properties and manufacturability. PDMS microfluidic devices are usually fabricated using soft lithography replica molding methods with master molds made of photolithogrpahy patterned photoresist layers on silicon wafers. The fabricated microfluidic channels often have rectangular cross-sectional geometries with single or multiple heights. In this paper, we develop a single step sequential PDMS wet etching process that can be used to fabricate microfluidic channels with various cross-sectional geometries from a single-layer PDMS microfluidic channels. The cross-sections of the fabricated channel can be non-rectangular, and varied along the flow direction. Furthermore, the fabricated cross-sectional geometries can be numerically simulated beforehand. In the experiments, we fabricate microfluidic channels with various cross-sectional geometries using the developed technique. In addition, we fabricate a microfluidic mixer with alternative mirrored cross-sectional geometries along the flow direction to demonstrate practical usage of the developed technique.
關鍵字polydimethylsiloxane;wet etching;microfluidics
語言英文
ISSN0960-1317
期刊性質國外
收錄於SCI;
產學合作
通訊作者Chien-Kai Wang and Yi-Chung Tung
審稿制度
國別英國
公開徵稿
出版型式,電子版,紙本
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